USER FEES

CHANL is operated as a recharge center, with user fees charged to recover the cost of instrument maintenance, supplies and materials. The fees for each resource are described in the tables below. Users are required to sign in and out of a logbook to track the amount of time used on a particular tool for billing purposes.

MICROSCOPY COSTS, PER HOUR

INSTRUMENT DESCRIPTION UNC NON-UNC ACADEMIC INDUSTRY
SEM Scanning Electron Microscope $23.00 $33.00 $46.00
ESEM FEI Quanta VP-SEM $20.00 $30.00 $40.00
FIB, SEM ONLY FEI Helios 600 Nanolab Dual Beam System $30.00 $45.00 $60.00
FIB FEI Helios 600 Nanolab Dual Beam System $65.00 $97.00 $130.00
TEM - 100CX-II JEOL - 100kV $40.00 $60.00 $80.00
TEM - 2010F-FasTEM JEOL - 200kV $65.00 $97.00 $130.00
AFM Asylum MFP3D $30.00 $45.00 $60.00
CONFOCAL Olympus IX81 $20.00 $30.00 $40.00
MSP JA Woolam Co. Inc. $15.00 $22.00 $30.00

EM SAMPLE PREPARATION COSTS

INSTRUMENT DESCRIPTION UNC NON-UNC ACADEMIC INDUSTRY
EM Processing   $5.00/sample + labor $7.50/sample + labor $10.00/sample + labor
ULTRATHIN SECTIONING   $5.00/sample + labor $7.50/sample + labor $10.00/sample + labor
THICK SECTIONING   $5.00/sample + labor $7.50/sample + labor $10.00/sample + labor
CRITICAL POINT DRIER
Self Service
Tousimis Semidri pvt3 $10.00/run $15.00/run $20.00/run
SPUTTER COATER
 
Cressington 108 Auto $1.00/nm $1.50/nm $2.00/nm

FABRICATION TOOL COSTS, PER HOUR

INSTRUMENT DESCRIPTION UNC NON-UNC ACADEMIC INDUSTRY
Clean Room Basic Tools Any tools not listed below.
Includes optical microscope, plasma cleaner, oven, profilometer, Filmmetrics, et cetera
$25.00 $37.00 $50.00
ALD Ultratech/Cambridge Nanotech Savannah S200 $.25/pulse; minimum $25.00/run $.37/pulse; minimum $37.00/run $.50/pulse; minimum $50.00/run
PECVD Advanced Vacuum Vision 310 $35.00 $52.00 $70.00
DRIE Alcatel AMS 100 $40.00 $60.00 $80.00
RF Sputter Deposition Kurt Lesker $35.00 $52.00 $70.00
E-BEAM Evaporator Thermionics $35.00 $52.00 $70.00
Photolitography/Mask Aligner KarlSuss MA6 $35.00 $52.00 $70.00
Pulsed Laser Deposition PVD Products Nano-PLD-1000 $25.00 $37.00 $50.00
Hot Embosser JenOptik HEX 03 $12.00 $18.00 $24.00
Laser Ablation Resonetics Rapid X250 $35.00 $52.00 $70.00
Wafer - 4"   $20.00 $20.00 $20.00
Wafer - 6"   $27.00 $27.00 $27.00

SPECTROSCOPY COSTS, PER HOUR

INSTRUMENT DESCRIPTION UNC NON-UNC ACADEMIC INDUSTRY
EDS Oxford Price included in the cost of the microscope
UPS Kratos Axis Ultra $30.00/hr $45.00/hr $60.00/hr
XPS Kratos Axis Ultra $30.00/hr $45.00/hr $60.00/hr
ELLIPSOMETER Microspectrophotometer $20.00/hr $30.00/hr $40.00/hr
MSP JA Woolam Co. Inc. $15.00/hr $22.00/hr $30.00/hr

TRAINING/STAFF TIME, PER HOUR

            UNC NON-UNC ACADEMIC INDUSTRY
            $50.00 $50.00 $75.00

CONTACT US

Chapel Hill Analytical & Nanofabrication Laboratory
243 Chapman Hall, CB# 3216
University of North Carolina
Chapel Hill, NC 27599-3216

cdonley@email.unc.edu
919-843-2859
919-843-8412

Chapman Hall

Chapman Hall at the University of North Carolina