Instrumentation

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CHANL is operated as a recharge center, with user fees charged to recover the cost of instrument maintenance, supplies and materials. The fees for each resource are described in the table below. Users are required to sign in and out of a logbook to track the amount of time used on a particular tool for billing purposes.

Below is a list of our instrumentation and services:

Fabrication Tools

DRIE* PECVD* Metal Sputtering*
Electron Beam Evaporator* Mask Aligner* Hot Embosser
Laser Ablation PLD Stylus Profiler*
Thin-Film Mapper* Oxygen Plasma system* Atmospheric Oven*
Optical Microscope* ASML 193 Stepper

 

Microscopy Tools

SEM ESEM FIB
TEM JEOL 100CX II TEM JEOL 2010F-FasTEM AFM
Confocal Microscope Electron Microscopy Sample Preparation Ultramicrotome
Critical Point Dryer Sputter Coater

 

Spectroscopy Tools

XPS UPS EDS
Ellipsometer