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ALD

September 12, 2019

ALD Description: Atomic Layer Deposition: Veeco/Cambridge Nanotech Savannah S200 (Gen1 and 2) Location: Chapman Hall – Cleanroom and B50 Uses: Deposition of highly conformal metal-oxide films with precisely controlled thickness on planar substrates and high-aspect ratio features. Specifications: Oxygen sources: … Continued

TEM – FEI Talos F200X

September 6, 2019

TEM Description: TEM: Talos F200X Location: Chapman Hall – B26B Uses: The Thermo Scientificâ„¢ Talos F200X scanning/transmission electron microscope (S/TEM) combines outstanding high-resolution S/TEM and TEM imaging with industry-leading energy dispersive x-ray spectroscopy (EDS) signal detection and 3D chemical characterization … Continued

AFM

February 28, 2019