EDS on SEM
Location: Hitachi S-4700 - Chapman 030A; FEI Helios 600 Nanolab - Chapman 030B
Uses:
Obtain site specific semi-quantitative elemental analysis of samples.
Specifications:- Si(Li) detector
- 30mm2 allows to collect data up to 3x the traditional 10mm2 Si(Li) detector.
- Excellent low energy performance and the ability to detect elements down to Be.
- INCA energy software is based around a Navigator and can be run on the Analyser, Point and ID and Mapping mode.
- INCA PentaFet –x3 is installed on the Hitachi S-4700 FESEM and the FEI Helios 600 Nanolab Dual Beam FIB System.
