Metal Sputtering

Description: Kurt Lesker PVD 75
Location: Chapman Hall - Cleanroom
Uses:

The PVD 75 magnetron sputtering system is used for deposition of metals

Specifications:

DC Magnetron sputtering
Materials available: Ag, Al, Au, Co, Cr, Cu, Fe, ITO, Ni, Pt, Ti, W.
Gases: Argon and Oxygen

Download Operating Procedure