Oxygen Plasma System
Location: Chapman Hall - Cleanroom
Uses:
The AutoGlow system is used for etching and cleaning surfaces or for surface activation processes. An oxygen plasma is generated using a 300 W RF power supply that can operate at powers between 10 – 300 W. The unit can handle 4” wafers or smaller.
Commonly used materials: Glass, Metals, Semiconductors, Polymers
Specifications:- Stripping of photoresist
- Ultra-cleaning of surfaces
- Wetability alteration
- Sample preparation for electron microscopy
- Treatment of surfaces to improve adhesion
