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microscopy
fabrication
spectroscopy

Oxygen Plasma System

Description: AutoGlow by Glow Research
Location: Chapman Hall - Cleanroom
Uses:

The AutoGlow system is used for etching and cleaning surfaces or for surface activation processes. An oxygen plasma is generated using a 300 W RF power supply that can operate at powers between 10 – 300 W. The unit can handle 4” wafers or smaller.

Commonly used materials: Glass, Metals, Semiconductors, Polymers

Specifications:

- Stripping of photoresist
- Ultra-cleaning of surfaces
- Wetability alteration
- Sample preparation for electron microscopy
- Treatment of surfaces to improve adhesion

Download Operating Procedure