Stylus Profiler

Description: KLA Tencor P-6
Location: Chapman Hall - Cleanroom
Uses:

The P-6 Stylus profiling system provides high resolution 2D and 3D analysis of surface topography. The analysis software can calculate a variety of surface parameters including step height, surface roughness and waviness.

Specifications:

Tip radius: 2 um
Vertical resolution: ~ 0.1 nm
Lateral resolution: 0.5 um
Maximum vertical range: 324 um
Stage diameter: 6”

Download Operating Procedure