Thin-Film Mapper
Location: Chapman Hall - Cleanroom
Uses:
The Filmetrics F50 is used to measure thickness of dielectrics, semiconductors, and thin, ~10nm, metal films. Measured films must be smooth and between 10nm and 70 microns thick. Optical constants, n and k, can also be measured on a variety of dielectric films. Commonly measured films include oxides, nitrides and photoresists. Films that can not be measured include very rough films and thick metal films.
Specifications:Integrated spectrometer/light source unit
fiber optic cable
4", 6" and 200mm wafer reflectance standards
TS-SiO2-4-7200 Thickness standard
BK7 reflectance standard
Flattening filter (for highly-reflective substrates)
Vacuum pump
Spare TH-1 lamp
