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Mask Aligner

INSTRUMENTS AND CAPABILITIES

fabrication

FACILITIES

CHANL’s instrumentation and office spaces are located throughout Chapman Hall with approximately 6,600 sq. ft of combined lab space, including a 2,200 sq ft cleanroom (Class 100 and 1000)


microscopy

MICROSCOPY

Scanning Electron Microscopy (SEM) – Hitachi S-4700 with EDS

Scanning Electron Microscopy (SEM) – FEI Helios 600 Nanolab with EDS

Transmission Electron Microscopy (TEM)– Thermo Scientific Talos F200X with EDS

Atomic Force-Infrared (AFM-IR) – Bruker nanoIR3

Atomic Force Microscopy (AFM) – Asylum Research MFP3D

Nanoindenter – Optics11 Piuma


fabrication

FABRICATION

Thin film deposition

Atomic Layer Deposition (ALD) – Veeco/Cambridge Nanotech Savannah S200

Plasma Enhanced Chemical Vapor Deposition (PECVD) – Advanced Vacuum Vision 310

E-beam evaporation – KJL PROLine PVD 75

E-beam evaporation – Thermionics VE100

Metal Sputtering – KJL PVD 75

Reactive Ion Etching

Deep Reactive Ion Etching (DRIE) – Alcatel AMS 100

Lithography

Mask Aligner – Karl Suss MA6/BA6

E-beam lithography – NPGS on FEI Helios FIB and Hitachi SEM

Surface Patterning

Focused Ion Beam (FIB) – FEI Helios 600 Nanolab


spectroscopy

SPECTROSCOPY

X-ray Photoelectron Spectroscopy (XPS) – Kratos Axis Ultra DLD with UPS

Ultraviolet Photoelectron Spectroscopy (UPS) – on Kratos XPS

Microspectrophotometry (MSP) – Craic 20/30 PV

Fourier Transform Infrared (FTIR) – Bruker Optics Hyperion 1000 with Tensor 27

Atomic Force-Infrared (AFM-IR) – Bruker nanoIR3

Spectroscopic Ellipsometry – J.A. Woollam VASE

Energy Dispersive Spectroscopy (EDS) – Oxford Instruments, INCA PentaFET

X-ray Diffraction (XRD) – Rigaku SmartLab


microscope

Specimen Preparation

FIB lift-out Nanomanipulator – FEI EasyLift

Cryo Ultramicrotome – Leica EM UC7

Critical Point Dryer

Sputter Coater – Cressington 108 Auto


Additional Metrology

Stylus Profilometry – KLA-Tencor P-6

Reflectometry – F50 Thin Film Mapper

Optical Microscopy – Nikon …


Misc. Processing

Oxygen Plasma Cleaner – Glow Research

Wet benches

Spin coater

Hot plates

Orbital shaker

Photoresist Laminator

CHANL -  People and Instruments