Instrumentation
INSTRUMENTS AND CAPABILITIES
FACILITIES
CHANL’s instrumentation and office spaces are located throughout Chapman Hall with approximately 6,600 sq. ft of combined lab space, including a 2,200 sq ft cleanroom (Class 100 and 1000)
Other Chemistry Cores include:
Mass Spectrometry
Nuclear Magnetic Resonance
X-ray Crystallography
Electronics
MICROSCOPY
Scanning Electron Microscopy (SEM) – Hitachi S-4700 with EDS
Scanning Electron Microscopy (SEM) – FEI Helios 600 Nanolab with EDS
Transmission Electron Microscopy (TEM) – Thermo Scientific Talos F200X with EDS
Atomic Force Microscopy (AFM) – Bruker nanoIR3 – contact Joanna Atkin for support on the IR portion of this tool
Atomic Force Microscopy (AFM) – Asylum Research MFP3D
Nanoindenter – Optics11 Piuma
Specimen Prep
FIB lift-out Nanomanipulator – FEI EasyLift
Cryo Ultramicrotome – Leica EM UC7
Critical Point Dryer
Sputter Coater – Cressington 108 Auto
FABRICATION
Thin film deposition
Atomic Layer Deposition (ALD) – Veeco/Cambridge Nanotech Savannah S200
Plasma Enhanced Chemical Vapor Deposition (PECVD) – Advanced Vacuum Vision 310
E-beam evaporation – KJL PROLine PVD 75
E-beam evaporation – Thermionics VE100
Metal Sputtering – KJL PVD 75
Reactive Ion Etching
Deep Reactive Ion Etching (DRIE) – Alcatel AMS 100
Lithography
Mask Aligner – Karl Suss MA6/BA6
E-beam lithography – NPGS on FEI Helios FIB and Hitachi SEM
Maskless Laser writer – Heidelberg Instruments DWL 66FS
Surface Patterning
Focused Ion Beam (FIB) – FEI Helios 600 Nanolab
Cleanroom Metrology
Stylus Profilometry – KLA-Tencor P-6
Reflectometry – F50 Thin Film Mapper
Optical Microscopy – Nikon Eclipse LV150
Additional resources
Dicing Saw – Disco 3240
Oxygen Plasma Cleaner – Glow Research
Wet benches
Spin coater
Hot plates
Orbital shaker
Photoresist Laminator
SPECTROSCOPY
X-ray Photoelectron Spectroscopy (XPS) – Kratos Axis Supra
Ultraviolet Photoelectron Spectroscopy (UPS) – on Kratos XPS
Microspectrophotometry (MSP) – Craic 20/30 PV
Fourier Transform Infrared (FTIR) – Bruker Optics Hyperion 1000 with Tensor 27
Atomic Force-Infrared (AFM-IR) – Bruker nanoIR3 – contact Joanna Atkin for support
Spectroscopic Ellipsometry – J.A. Woollam VASE
Energy Dispersive Spectroscopy (EDS) – Oxford Instruments, INCA PentaFET
X-ray Diffraction (XRD) – Rigaku SmartLab
Helium Leak Detector – Agilent PD03
OTHER SPECTROSCOPY CORES
SOFT MATTER
MALDI-ToF – Bruker UltrafleXtreme
Hybrid DMA/Rheometer – TA Instruments HR30
Differential Scanning Calorimeter – TA Instruments DSC250
Thermogravimetric Analyzer – TA Instruments TGA5500
Universal Mechanical Tester – Instron SC4-1
Nanoindenter – Optics 11 Piuma (located in the CHANL Microscopy Core Lab)
