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Electron Beam Evaporator

Description: Electron Beam Evaporator – Kurt Lesker PRO Line PVD 75
Location: Chapman Hall - Cleanroom
Uses:

E-beam evaporation for high quality metal films. Load lock enables deposition at E-8 torr pressure range within 15 minutes.

Specifications:

5 kW e-Gun evaporation source
Base pressure: ~2E-8 torr
4 crucible pockets
Water cooled substrate holder
Loadlocked
Automated deposition rate and endpoint control
Materials Available: Ag, Al, Au, Cr, Pd, and Ti.

Download Operating Procedure